Development of a 500kV 15mA power supply for ion accelerator
Konferenz: EMIE 2022 - The 2nd International Conference on Electronic Materials and Information Engineering
15.04.2022 - 17.04.2022 in Hangzhou, China
Tagungsband: EMIE 2022
Seiten: 6Sprache: EnglischTyp: PDF
Autoren:
Li, Xiaofeng (Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences University of Science and Technology of China Hefei, China)
Huang, Yiyun; Hu, Hejun; Chen, Hui (Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences Hefei, China)
Inhalt:
The research object of this paper is the high voltage power supply for ion implantation machine. The main objective is to develop and design a 500kV/15mA high voltage power supply for ion accelerator. The main predetermined indicators of the power supply are: 500kV/15mA high voltage DC output, the ripple is less than 0.1%, the frequency of charging voltage of high voltage multiplier is greater than 20kHz. This paper mainly studied and designed the hardware topology of the main circuit of power supply, and divided the main circuit into low voltage part and high voltage part by analyzing its structure. As for the low voltage part: the rectifier circuit, inverter circuit and resonant circuit are analyzed and designed in detail; as for the high voltage part: the step-up transformer and voltage doubling circuit are analyzed and designed in detail. Finally, the feasibility of the theoretical design is verified by computer simulation and experimental prototype.