How to construct a full-range low-drive optical switch
Konferenz: MEMAT 2022 - 2nd International Conference on Mechanical Engineering, Intelligent Manufacturing and Automation Technology
07.01.2022 - 09.01.2022 in Guilin, China
Tagungsband: MEMAT 2022
Seiten: 6Sprache: EnglischTyp: PDF
Autoren:
Shi, Dehai (GuiZhou Vocational Technology College of Electronics & Information, GuiZhou, China)
Zhang, Junyu; Xiao, Jing (School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology, Guilin, China)
Chen, Shirong (Guilin Aerospace Electronic Co., Ltd., Guilin, China)
Inhalt:
In order to obtain a full-scale MEMS optical switch with excellent driving characteristics as the goal, a full-scale MEMS optical switch is constructed according to the influence of the change of the upper and lower plate thickness on the pull_in function, and the key parameters of the optical switch comb are analyzed. The influence of driving characteristics to select the appropriate optical switch size parameters.