3D applicable ALD film for humidity detection
Konferenz: Smart Systems Integration - 13th International Conference & Exhibition on Integration Issues of Miniaturized Systems
10.04.2019 - 11.04.2019 in Barcelona, Spain
Tagungsband: Smart Systems Integration
Seiten: 4Sprache: EnglischTyp: PDF
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Autoren:
Dogan, Oezgue; Goertz, Michael (Fraunhofer IMS, Micro and Nanosystems, 47057 Duisburg, Germany)
Mokwa, Wilfried (RWTH Aachen University, Department of Materials in Electrical Engineering, 52074 Aachen, Germany)
Vogt, Holger (University of Duisburg-Essen, Department of Electronic Components and Circuits, Duisburg, 47057 Germany)
Inhalt:
In this work, ALD films are developed by alternately applying semiconducting ZnO grains and dielectric Al2O3 grains which result in homogeneous composites with humidity-sensitive properties. Various films, which differ in the grain size ratio of ZnO to Al2O3, are tested with 2D sensor structures. IV-t measurements during interaction of the films with applied water droplets reveal current and resistance changes of up to five orders of magnitude. 3D applicability of these humidity-sensitive films is proven by cross-sectional SEM images of an all-around coated silicon chip.