Increasing piezo micro diaphragm pump performance by optimizing piezo actuation

Inhalt:
Actuation of piezo ceramics applies only up to 30% of their negative coercive field strength Ec. This ample distance of the field where polarization reaches zero is necessary to avoid depolarization. This work examines the effect of further approaching Ec on micro diaphragm pumps. The higher negative actuation voltage increases two fundamental micro pump characteristics. First, would be an increase of maximal flow and second a better air backpressure capability. Sinusoidal actuation, applying higher negative voltages, while keeping the positive amplitude on a standard level, does not cause degradation within one million cycles.