Fiber-chip coupling for advanced microsystems

Inhalt:
Fiber coupling of optical microsensors offer advantages like increased sensitivity and geometric versatility to enable application in high voltage, electrically noisy, high/low temperature and many others. In this paper we introduce a silicon wafer based fiberchip coupling. Optical sensors can be coupled with a silicon carrier wafer via flip-chip mounting. The silicon carrier wafer enables electrical contact to the sensor and a defined optical fiber mounting. As examples for the technology, we present a flip-chip assembly of a superconducting single photon detector and a miniaturized fiber Bragg grating sensor.