A Dielectric Elastomer based Miniaturized Soft Planar Microactuator

Konferenz: ACTUATOR 2024 - International Conference and Exhibition on New Actuator Systems and Applications
13.06.2024-14.06.2024 in Wiesbaden, Germany

Tagungsband: GMM-Fb. 110: ACTUATOR 2024

Seiten: 4Sprache: EnglischTyp: PDF

Autoren:
Holzer, Simon; Tiwari, Bhawnath; Konstantinidi, Stefania; Civet, Yoan; Perriard, Yves

Inhalt:
Precise and robust positioning features are vital need in modern-day industries, particularly in the context of industrial automation within the micro/meso domain. In this work, we present a novel miniaturized planar microactuator with a total size of 40 mm in diameter, allowing maximum planar stroke of 220 µm in 100 ms. The actuator exhibits fine positioning with an accuracy of 4.5 µm. This paper discusses the system design, fabrication and experimental validation of the device performance.