Monolithic integration of permanent magnets in SOI-based micro-mechanisms

Inhalt:
In this paper, we report two different fabrication technologies for integrating hard magnetic material into Silicon-on-Insulator (SOI) substrates. The first approach involves the deposition of NdFeB through sputtering, while the second method focusses on inserting NdFeB powder into pre-etched cavities of an SOI substrate and subsequent agglomeration by ALD. We demonstrate the implementation of these process flows within a typical MEMS SOI technology process. Applying these two fabrication techniques, we demonstrate the fabrication and characterization of a micromagnetic transducer which allows to convert an external magnetic field into a force and displacement within a microsystem.