Experimental characterisation of a piezoelectrically actuated force amplifier using optical and self-sensing methods
Konferenz: ACTUATOR 2022 - International Conference and Exhibition on New Actuator Systems and Applications
29.06.2022 - 30.06.2022 in Mannheim
Tagungsband: GMM-Fb. 101: ACTUATOR 2022
Seiten: 4Sprache: EnglischTyp: PDF
Autoren:
Mueller, Sonja (Furtwangen University, Institute for Microsystems Technology (iMST), Furtwangen, Germany & University of Freiburg, Department of Microsystems Engineering, Freiburg, Germany)
Rupitsch, Stefan J. (University of Freiburg, Department of Microsystems Engineering, Freiburg, Germany)
Mescheder, Ulrich (Furtwangen University, Institute for Microsystems Technology (iMST), Furtwangen, Germany)
Inhalt:
In this work, we characterise a flexural mechanical amplifier, which is used for the realisation of a miniaturised piezoelectric inchworm motor designed for large force (some N) and stroke (tens of mm) operation as it is required e.g., for medical implants. The characterisation is based on high precision optical displacement measurements and a force self-sensing approach. An optically measured displacement of 292 nm in lateral direction and 910 nm in vertical direction of the flexural mechanical amplifier has been obtained, corresponding to a deflection attenuation factor of 3.1. Piezoelectric self-sensing of force was used to determine a force amplification factor of 3.43 from the mechanical oval structure.