Characterisation of Static Pull-In Effect of Hybrid Levitation Micro-Actuators for Square-Shaped Proof Masses
Konferenz: ACTUATOR 2022 - International Conference and Exhibition on New Actuator Systems and Applications
29.06.2022 - 30.06.2022 in Mannheim
Tagungsband: GMM-Fb. 101: ACTUATOR 2022
Seiten: 4Sprache: EnglischTyp: PDF
Autoren:
Lee, Chun Him (Institute of Microstructure Technology, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany & Karlsruhe University of Applied Sciences, Karlsruhe, Germany)
Kumar, Sreejith Sasi (Institute of Microstructure Technology, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany & Technische Universität Ilmenau, Germany)
Mamleyev, Emil; Poletkin, Kirill (Institute of Microstructure Technology, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany)
Inhalt:
This work presents a comprehensive study of the static pull-in phenomenon of a square-shaped proof mass in the hybrid levitation micro-actuators (HLMA), combining inductive suspension and electrostatic actuation. The reported quasi-finite element method (quasi-FEM) modelling is developed describing the pull-in actuation with a calculation of the localized eddy current and magnetic field with the capability of arbitrary modelling shapes. This modification removes the restriction of the blank disc-shaped proof mass only simulation and creates a more extensive application for the HLMA modelling. The obtained result from this model is verified with coherent experimental data.