A Planar Single-Actuator Bi-Stable Mechanical/Electrical Switch

Inhalt:
A micro-fabricated planar bi-stable mechanical/electrical switch is presently demonstrated. The bi-stable structure, cooperating with a lever-based displacement amplifier driven by a single electrothermally activated in-plane actuator, performs the mechanical/electrical switching between two stable states. A quasi-symmetric mechanism requiring no sharpened beams is employed for smooth contact, compact size and simple operating principle, thus moderating process fluctuation and promoting stability. Implemented on a silicon-on-insulator wafer, the device could be switched mechanically with minimum voltage of 10.6 V and 9.2 V for setting and resetting, respectively. More than 140, 000 times of bi-stable states switching identified by a rigid electrical detection procedure, the switch exhibits high durability and robustness.