Damped silicon microprobes for high-speed roughness measurements
Konferenz: MikroSystemTechnik Kongress 2021 - Kongress
08.11.2021 - 10.11.2021 in Stuttgart-Ludwigsburg, Deutschland
Tagungsband: MikroSystemTechnik Kongress 2021
Seiten: 4Sprache: EnglischTyp: PDF
Autoren:
Fahrbach, Michael; Peiner, Erwin (Technische Universität Braunschweig, Institute of Semiconductor Technology (IHT), Laboratory for Emerging Nanometrology (LENA), Braunschweig, Germany)
Ombati Nyang'au, Wilson (Technische Universität Braunschweig, Institute of Semiconductor Technology (IHT), Laboratory for Emerging Nanometrology (LENA), Braunschweig, Germany & Kenya Bureau of Standards (KEBS), Department of Metrology, Nairobi, Kenya)
Domanov, Oleg; Schwalb, Christian H. (GETec Microscopy GmbH, Wien, Austria)
Xu, Min; Li, Zhi; Kuhlmann, Christian; Brand, Uwe (Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany)
Inhalt:
A coating to increase the maximum probing speed of tactile cantilever sensors by increasing their damping is proposed. A corresponding deposition process is presented and first tests are performed. The coating thickness and the damping of the sensor, respectively, are evaluated in relation to the number of coatings that have been applied. Finally, the optimum coating thickness to maximize the probing speed is estimated.