Design Concepts of Multistage Multistable Cooperative Electrostatic Actuation System with Scalable Stroke and Large Force Capability

Inhalt:
This paper presents an innovative concept of a miniaturized electrostatic inchworm. The proposed design consists of multiple electrostatic electromechanical actuators that cooperatively operate to generate linear and large force actuation. Gap closing variable capacitor is the core design of the system for generating the desired large electrostatic force. The structural design, operation concept and system modelling of such system are described.