Motion analyzer for characterization of micro actuators with movements in 3 degrees of freedom

Inhalt:
This work presents a novel measurement device for the deflection and temperature distribution of polymer electrothermal actuators. Combining a CCD camera with optical pattern matching and a laser triangulation measurement system the motion analyzer enables the characterization of movements in three degrees of freedom in a measurement range of 4.5 mm x 4.5 mm x 4 mm. Occurring optical errors, measurement accuracies and dynamic limits of the motion analyzer are determined.