A Novel High–Precision Magnetic Levitation System

Inhalt:
In many modern applications, such as the semiconductor manufacturing or biotechnology, multi-coordinate positioning systems are applied, which are characterized by high precision and dynamic. By using magnetic guidance in this positioning system, position accuracies in the nm-range are possible as well as application in clean-room and vacuum environment. This paper presents a novel magnetic levitation system with six degrees of freedom, which is characterized by a very simple compact construction with a relatively low-power consumption of the magnetic guidance. The proposed novel design of the air-core coils allows the implementation of simplified control algorithm as well as a low weight mover. The first results from the control of the magnetic guidance with stationary positioning are presented.