Modeling and Optimization of Ohmic Series RF MEMS Switches by using Neural Networks

Inhalt:
In this paper, artificial neural networks (ANNs) are proposed to be used as a very efficient simulation and optimization tool to replace time consuming full-wave simulations of electrical characteristics of an ohmic series RF MEMS switches in coplanar technology. ANNs are trained to determine the scattering parameters of a switch for given values of lateral dimensions of the switch and the frequency. Not only the bridge lateral dimensions but also lateral dimensions of the gap between bridge and ground are considered. By using the proposed ANN based model, the time needed for device design is significantly reduced, especially when optimizations of the dimensions are required in order to meet the specified criteria.