A Multifunction pump based on microfabricated electromagnetic actuator

Inhalt:
This work presents the fabrication and development of a multifunction micropump based on integrated microfabricated electromagnetic actuator. The electromagnetic actuation concept depends on controlling the rotation of two hard magnets placed in an annular channel under the influence of a moving electromagnetic field. Due to magnet movement, the fluid is pushed out through the outlet and withdrawn into the channel from the inlet. The validity of the proposed concept has been firstly tested in the meso-scale. Measurements showed that a maximum volumetric flow rate of 13.7 ml/min and maximum back pressure of 785 Pa are achieved at rotational speeds of 200 rpm and 135 rpm, respectively. The pump has attractive advantages such as capable of handling a wide range of fluids, and can be operated at low shear stresses. These advantages allow the proposed micropump to be successfully implemented in the highly demanding biological and biomedical microsystems.