Nanomembranes – a link between MEMS and NEMS
Konferenz: MikroSystemTechnik - KONGRESS 2009
12.10.2009 - 14.10.2009 in Berlin, Germany
Tagungsband: MikroSystemTechnik
Seiten: 4Sprache: EnglischTyp: PDF
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Autoren:
Matovic, Jovan; Adamovic, Nadja; Schmidt, Ulrich (Institute of Sensor and Actuator Systems,Vienna University of Technology, Vienna, Austria)
Jakšic, Zoran (Institute of Chemistry, Technology and Metallurgy, University of Belgrade, Belgrade, Serbia)
Inhalt:
This paper presents some properties of nanomembranes (i.e. nanometer-thin, freestanding, self-supported planar structures) as well as some of their applications in various MEMS devices. Nanomembranes belong both to the nanostructures (due to their thickness which is in the range 1 to 100 nm) and to the MEMS (due to the areas which may be up to a few millimeter square, even a centimeter square). The integration of the nanomembranes into MEMS devices open a wide area of novel possibilities, not available with traditional MEMS membranes.