Cover IEC TS 62607-6-5:2022
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IEC TS 62607-6-5:2022

Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement

Ausgabedatum: 2022-12
Edition: 1.0
Sprache: EN - englisch
Seitenzahl: 23 VDE-Artnr.: 251440

Inhaltsverzeichnis

IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristics

  • contact resistance, and
  • sheet resistance
for graphene-based materials and other two-dimensional materials by a
  • transmission line measurement.
The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.
  • The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
  • The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.