IEC 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Ausgabedatum:
2014-06
Edition:
1.0
Sprache: EN-FR - zweisprachig englisch/französisch
Seitenzahl: 26 VDE-Artnr.: 220883
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.