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DIN EN 60204-33 VDE 0113-33:2011-11

Safety of machinery – Electrical equipment of machines

Part 33: Requirements for semiconductor fabrication equipment

(IEC 60204-33:2009, modified); German version EN 60204-33:2011
Class/Status: Standard, valid
Released: 2011-11
VDE Art. No.: 0113033

Contents (only German)

This part of DIN EN 60204 (VDE 0113) applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
This part is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current and not exceeding 1 500 V for direct current, and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed.

Title Format
VDE-Prüfung nach BetrSichV, TRBS und DGUV-Vorschrift 3
Hennig, Wilfried

VDE-Prüfung nach BetrSichV, TRBS und DGUV-Vorschrift 3

Erläuterungen zu DIN VDE 0100-410, DIN VDE 0100-430, DIN VDE 0100-510, DIN VDE 0100-540 und DIN VDE 0100-600, DIN VDE 0105-100/A1, DIN VDE 0701-0702, DIN EN 61557 (VDE 0413), DIN EN 60204-1 (VDE 0113-1), TRBS 1001, TRBS 1111, TRBS 1201, TRBS 1203, DGUV-Vorschrift 3 (BGV A3) sowie zur Betriebssicherheitsverordnung (BetrSichV)
VDE-Schriftenreihe – Normen verständlich, Band 43

2019, 547 pages, Din A5, Broschur

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 eBook (PDF)