Development of semiconductor communication software device based on SECS/GEM protocol

Abstract:
The complexity of semiconductor production process and the wide variety of semiconductor production equipment, and there is no unified communication standard between the equipment, which seriously limits the development of semiconductor factory production automation. Facing this situation, this paper proposes a method of developing semiconductor communication software based on SECS/GEM protocol. This paper introduces the basic content of SECS/GEM communication protocol, integrates and analyzes the state model of each layer of the protocol, designs and implements the communication software according to the actual situation in factory production, tests the communication software, verifies that the software meets the basic functions defined by SECS/GEM, carries out relevant message transmission and performance comparison, and proves the superiority of the communication software.