Development and Design of Semiconductor Numerical Computing Software Based on Monte Carlo and Finite Element Method

Abstract:
The main work of this paper is to combine the advantages of Finite Element Method (FEM) and Monte Carlo (MC) method in semiconductor numerical modeling and calculation, and develop and design a semiconductor numerical calculation software based on the combination of FEM and MC method. It mainly includes a complete set of semiconductor numerical calculation tools, such as mesh discrete module, partial differential equation (PDE) module, MC module and visualization (VTK) module. Different from the general MC method, the Poisson equation coupling solution module in the MC method is solved by the FEM, which can adapt to various irregular discrete calculations. The device discretization can be optimized according to the actual needs, so that relatively accurate calculation results can be obtained while consuming less resources.