?omplete set of the special process equipment for the defect-free production of reticles

Abstract:
The paper presents an integrated solution of a problem to develop a set of the equipment for the defect-free production of reticles and photomasks. The integrated approach to the equipment design allows to obtain certain advantages disclosed below. Accordingly, the paper highlights the following main issues: ^- Practical realization of these advantages in the special process equipment developed by the KBTEM-OMO enterprise of the PLANAR. ^- Advantages in the development of a complete set of the special process equipment. Without taking into account technical and chemical processes, this complete set includes three component parts: ^- Multi-beam laser pattern generator; ^- Die-to-Database reticle inspection system; ^- Laser reticle repair system.