Miniaturization of HASEL Actuators for Next-Generation Applications

Abstract:
Hydraulically Amplified Self-Healing Electrostatic (HASEL) actuators have emerged as a promising technology due to their exceptional performance characteristics, including high force output, large displacement, and low power consumption. However, the bulky size of conventional HASEL actuators has hindered their integration into miniaturized devices, limiting their applicability in various domains. This paper explores the miniaturization of HASEL actuators through a synergistic combination of microfabrication techniques and flexible materials and introduces a novel rapid production method. Microfabrication techniques, offer the precision and control necessary to create miniaturized HASEL actuators with intricate features and enhanced performance.