A Dielectric Elastomer based Miniaturized Soft Planar Microactuator

Conference: ACTUATOR 2024 - International Conference and Exhibition on New Actuator Systems and Applications
06/13/2024 - 06/14/2024 at Wiesbaden, Germany

Proceedings: GMM-Fb. 110: ACTUATOR 2024

Pages: 4Language: englishTyp: PDF

Authors:
Holzer, Simon; Tiwari, Bhawnath; Konstantinidi, Stefania; Civet, Yoan; Perriard, Yves

Abstract:
Precise and robust positioning features are vital need in modern-day industries, particularly in the context of industrial automation within the micro/meso domain. In this work, we present a novel miniaturized planar microactuator with a total size of 40 mm in diameter, allowing maximum planar stroke of 220 µm in 100 ms. The actuator exhibits fine positioning with an accuracy of 4.5 µm. This paper discusses the system design, fabrication and experimental validation of the device performance.