High-Accuracy Alignment of integrated Optical Components utilizing Ferroelectric Shape-Memory Actuators

Abstract:
High-precision alignment of optical elements is crucial for the development and manufacture of highly integrated optical systems. Controlled ferroelectric actuators, known for their unlimited displacement resolution, are ideal for such precise alignment tasks. Traditionally, such actuators are driven unipolarly along the predetermined delivery state polarization direction and require a constant voltage level to maintain the alignment, which is impractical for long-term applications. This paper presents a novel approach for harnessing the ferroelectric shape-memory effect through intentional manipulation of ferroelectric material polarization, thereby enabling control over its remanent strain. This remanent strain maintains without external power supply, presenting an ideal solution for long-term alignment tasks. Furthermore, this technique allows the readjustment of the optical components in response to aging, drifting, disturbance or changes in tolerance.