Public Content Characteristics of Resonance Type Piezoelectric Motors Made with Textured Piezoceramics Material

Abstract:
Common material for resonance drive type (ultrasonic) motors are made with hard type piezoelectric ceramics (Hard PZT), which have very low dielectric loss and high mechanical quality factor around 2000. On the other hand, their piezoelectric charge constants are inferior to soft type piezoelectric ceramic materials. Unavailability of a Hard PZT with high piezoelectric charge constant has been one of the limiting factors in ultrasonic motor designs. A newly developed PMN-PZ-PT based textured piezoelectric ceramic material (TX101) enables a new design space for ultrasonic motors by providing a hybrid solution with a high piezoelectric charge constant even larger than common soft type piezoelectric ceramics and semi hard type characteristics with low dielectric loss and relatively high mechanical quality factor of around 500. We evaluated two resonance type of piezoelectric motors made with this textured piezoelectric material.