Performance Comparison of MR Sensors on Silicon and Bare PEEK (Polyether Ether Ketone) Wafers

Abstract:
At the Institute of Micro Production Technology (IMPT) at Leibniz University Hannover in cooperation with Ensinger GmbH, the performance of magneto resistive (MR) sensors is being investigated and compared using the example of the anisotropic magneto resistive (AMR) effect on conventional silicon wafers and on bare PEEK wafers. The newly founded start-up Ensinger Microsystems from Ensinger GmbH has recently added wafers made of the high-performance plastic TECACOMP(r) PEEK LDS to its portfolio as an alternative to silicon wafers. AMR sensors are produced and characterised on both substrates using microtechnological processes within the scope of these investigations. The performance with regard to the measurement signal is characterised and compared.