Correlative surface characterization micro-electro-mechanical-systems
Conference: MikroSystemTechnik Kongress 2023 - Kongress
10/23/2023 - 10/25/2023 at Dresden, Deutschland
Proceedings: MikroSystemTechnik Kongress 2023
Pages: 7Language: englishTyp: PDF
Authors:
Kabbe, Maximilian H.; Thelen, Richard; Brandner, Juergen J. (Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany & Karlsruhe Nano Micro Facility KNMFi, Karlsruher Institut für Technologie Kit, Eggenstein-Leopoldshafen, Germany)
Korvink, Jan G. (Institute of Microstructure Technology (IMT), Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, Germany)
Abstract:
Micro electro mechanical systems (MEMS) are found almost everywhere in our daily lives and become indispensable. With their increasing significance functionality and quality demands placed on them are increasing. Their perfomance has to be enhanced with consistent quality and reducing costs. To deal with that requirements, it is essential to get more information about already manufactured MEMS. Correlative surface measurements with complementary measurement methods can be a way to increase the volume of information about manufactured structures. With the gain of information, predictions about new materials and structures can be made reducing development expenses for new MEMS.