A novel method to characterize the correlation between gas diffusion and sodium contamination of anodic bonding
Conference: MikroSystemTechnik Kongress 2023 - Kongress
10/23/2023 - 10/25/2023 at Dresden, Deutschland
Proceedings: MikroSystemTechnik Kongress 2023
Pages: 4Language: englishTyp: PDF
Authors:
Zhang, Yucheng; Solazzi, Francesco; Schreiber, Kai; Sorschag, Kurt; Aschauer, Elmar (Infineon Technologies AG, Villach, Austria)
Schiffer, Michael; Lang, Klaus-Dieter (Fraunhofer IZM, Berlin, Germany)
Cselyuszka, Norbert; Andrianov, Nikolai (Silicon Austria Labs, Villach, Austria)
Abstract:
In this paper, we propose a novel mechanism that relates the sodium (Na) migration process to the gas flow and manage to characterize the influence of sodium contamination by using a twin sensor structure.