In-situ SEM Analysis Tool for Stretchable Metal-Elastomer-Laminate-Membranes for Flexible Sensors
Conference: MikroSystemTechnik Kongress 2023 - Kongress
10/23/2023 - 10/25/2023 at Dresden, Deutschland
Proceedings: MikroSystemTechnik Kongress 2023
Pages: 6Language: englishTyp: PDF
Authors:
Sittkus, Benjamin (Institute of Microsystems Technology (iMST), Faculty of Mechanical & Medical Engineering, Furtwangen University, Furtwangen, Germany & IMTEK - Department of Microsystems Engineering, University of Freiburg, Germany)
Urban, Gerald (IMTEK - Department of Microsystems Engineering, University of Freiburg, Germany)
Mescheder, Ulrich (Institute of Microsystems Technology (iMST), Faculty of Mechanical & Associated to the Faculty of Engineering, University of Freiburg, Germany)
Abstract:
A low cost in-situ Scanning-Electron-Microscopy (SEM) analysis system is presented, addressing some crucial points for effective in-situ morphology analysis of Metal-Elastomer-Laminate-Composites (MELCs). The focus thereby is on the deformation induced morphology changes and consequently the strain-crack relation. Beside the description of the system’s buildup, an exemplary biaxial tensile testing sequence of evaporated ultrathin metal films (4 nm titanium (Ti) and 40 nm gold (Au)) on Polydimethylsiloxane (PDMS) membranes (100 µm thickness) is presented. Thereby an interesting observation paradox due to the e-beam irradiation of the surface morphology is observed and a preliminary discussion based on literature findings is conducted. The testing tool and derived test protocols are interesting for different types of investigations in the field of flexible electronics and flexible sensors, e.g. for healthcare applications.