Microscale Monocrystal Ultrasonic Actuators for Miniature Optical Systems

Abstract:
As part of a feasibility study, a microscale lead-free ultrasonic actuator made of monocrystalline lithium niobate (LiNbO3) was developed as a drive for miniaturized optical assembly modules. An FEM program examined and verified the crystallographic orientation of the actuator plate required for the actuator to achieve optimal oscillation behavior. The actuators were built into a miniature module especially constructed for this purpose, electrical parameters were measured, and the motion performance was tested. A comparison was made between the electrical and mechanical parameters of the monocrystalline actuator and the parameters of the same actuators made of polycrystalline piezoelectric ceramic.