Processing method of thin metal-polymer laminate membranes and transfer to cylindrically shaped substrates for flexible sensors
Conference: MikroSystemTechnik Kongress 2021 - Kongress
11/08/2021 - 11/10/2021 at Stuttgart-Ludwigsburg, Deutschland
Proceedings: MikroSystemTechnik Kongress 2021
Pages: 4Language: englishTyp: PDF
Authors:
Sittkus, Benjamin (Institute for Microsystems Technology (iMST), Furtwangen University, Furtwangen, Germany & IMTEK – Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany)
Mescheder, Ulrich M. (Institute for Microsystems Technology (iMST), Furtwangen University, Furtwangen, Germany & Associated to the Faculty of Engineering, University of Freiburg, Freiburg, Germany)
Urban, Gerald (IMTEK – Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany)
Abstract:
A simple processing method for the manufacturing of thin metal-polymer laminate membranes is presented. Thereby, an UV-activated cover foil preserves the mechanically sensitive surface morphology and supports the high compliant elastomer membrane. This is shown by transferring a Polydimethylsiloxane (PDMS) membrane, coated with an ultrathin metal layer, to a cylindrical sensor substrate via PDMS-PDMS bonding based on partial curing. The morphology of the metal film is analysed with Scanning Electron Microscopy (SEM) at each relevant step, proving that the crack morphology is not changed during the handling of the membrane. The necessary bonding force for a successful membrane transfer is detemined to around 0.07 N/mm via peel testing.