Effect of Actuation Signal on Single Stroke Volume in Metal Micro Diaphragm Pumps
Conference: ACTUATOR - International Conference and Exhibition on New Actuator Systems and Applications 2021
02/17/2021 - 02/19/2021 at Online
Proceedings: GMM-Fb. 98: ACTUATOR 2021
Pages: 4Language: englishTyp: PDF
Authors:
Thalhofer, Thomas (Fraunhofer EMFT Research Institution for Microsystems and Solid State Technologies, Munich, Germany & Heinz-Nixdorf-Chair of Biomedical Electronics, Technical University of Munich, TranslaTUM, Munich, Germany)
Bussmann, Agnes; Durasiewicz, Claudia (Fraunhofer EMFT Research Institution for Microsystems and Solid State Technologies, Munich, Germany)
Hayden, Oliver (Heinz-Nixdorf-Chair of Biomedical Electronics, Technical University of Munich, TranslaTUM, Munich, Germany)
Abstract:
Micropumps are a key component for many microfluidic applications, because of their ability to accurately transport tiny amounts of fluids. In this paper we investigate the influence of the pump driving signal on Fraunhofer EMFT’s steel micro diaphragm pumps using a parameter study. The varied parameters include actuation signal shape and slew rate, signal amplitude and signal frequency. For each set of parameters, at least ten gravimetric measurements are taken to determine the dosed volume per stroke. Using a signal amplitude of +300 V / -80 V, a stroke volume of 11.1±0.1 mul was achieved. This stroke volume decreases linearly down to 5.0±0.5 mul at an amplitude of +80 V / -80 V. The flank steepness only had an influence on the dosed volume when it was slower than a 60 Hz sine. Actuation frequency itself had a negligible influence on the dosed volume as long as it was below 20 Hz.