Effects of hydrogen treatment and substrate hardness on the negative magnetostrictive thin films and their coatings
Conference: ACTUATOR - International Conference and Exhibition on New Actuator Systems and Applications 2021
02/17/2021 - 02/19/2021 at Online
Proceedings: GMM-Fb. 98: ACTUATOR 2021
Pages: 4Language: englishTyp: PDF
Authors:
Tokiwa, Ren; Ono, Seo; Uchida, Helmut Takahiro (Course of Mechanical Engineering, Graduate School of Engineering, Tokai University, Kitakaname 4-1-1, Kanagawa, Japan)
Nakahiro, Shuntaro; Kamiya, Masato; Gemma, Ryota; Matsumura, Yoshihito (Course of Applied Science, Graduate School of Engineering, Tokai University, Kitakaname 4-1-1, Kanagawa, Japan)
Abstract:
Negative magnetostrictive Sm-Fe films and Pd films were prepared by a DC magnetron sputtering process on single-crystal Si (100) substrates and on polyimide substrate. Controlled amount of hydrogen was loaded electrochemically via step-by-step method to the prepared films. The interferometric microscope and Newton ring method were applied to scan the curvature and 3D geometry of the films in equilibrium states at each hydrogen concentration. Developments of the compressive stress by a small amount of hydrogen uptake, and the stress release via film delamination at high hydrogen concentration regime were observed. The validity of the hydrogen loading treatment for tuning internal stress in Sm-Fe film, its adhesion, and the in-plane stress impact on the thermodynamic properties in capping metal-hydrogen systems will be discussed.