Technologien und Werkstoffe der Mikrosystem- und Nanotechnik
All proceedings of this conference

Fabrication of 3D nanostructures by direct laser writing

Conference: Technologien und Werkstoffe der Mikrosystem- und Nanotechnik - 2. GMM-Workshop
05/10/2010 - 05/11/2010 at Darmstadt, Germany

Proceedings: Technologien und Werkstoffe der Mikrosystem- und Nanotechnik

Pages: 2Language: englishTyp: PDF

Personal VDE Members are entitled to a 10% discount on this title

Authors:
Radke, A.; Wolff, F.; Klotzbücher, T. (Institut für Mikrotechnik Mainz GmbH, 55129 Mainz, Germany)
Radke, A.; Giessen, H. (Universität Stuttgart, 4. Physikalisches Institut, 70550 Stuttgart, Germany)

Abstract:
Direct laser writing via two-photon absorption was used to fabricate three-dimensional structures with sub-µm resolution. As a proof of concept, woodpile photonic crystals were fabricated that show a characteristic dip in transmission at near-infrared wavelengths in correspondence to S-matrix calculations.