Cover IEC 62047-21:2014
größer

IEC 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Circulation Date: 2014-06
Edition: 1.0
Language: EN-FR - bilingual english/french
Seitenzahl: 26 VDE Artno.: 220883

Content

IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.